Composite Sputtering Target Structures

A target structure is provided for use in a magnetically enhanced diode sputter coating source having a sputtering target which at end-of-life has an eroded surface with a known shape.

The sputtering target has a non-sputtered profiled back surface conforming substantially in shape to the eroded surface at end-of-life.

A backing plate is bonded to the sputtering target which has a bonding surface complementary to the non-sputtered back surface of the sputtering target and is designed to mate therewith.

A method is provided for fabricating the target structure and bonding the sputtering target to the backing plate by isostatic pressing. Read More