Successful Large-Area Sputtering

Cylindrical rotating magnetrons can provide controlled reactive sputtering on both large areas and high-volume products, while also minimizing arcing and anode problems.

Magnetron sputtering, combined with an accurate control of process parameters and layer quality, has become one of the most important methods for depositing thin films. The technique involves bombarding a target surface, which is positioned on a magnetic tube, with an ionized gas. The gas causes metallic atoms to be ejected from the target and subsequently deposited on the substrate to be coated. In standard metallic sputtering, an inert gas, such as argon, is used. No chemical reaction occurs between the gas and the target particles, resulting in a coating on the substrate with a composition similar to the target material.

In a reactive sputtering process, at least one reactive gas (e.g., oxygen or nitrogen) is added. The reactive gas enhances the sputtering process on the target surface and also generates a chemical reaction with the target particles, forming a compound layer on the substrate. As a result, high-purity, uniform coatings can be achieved. Read More