Sputtered Films and Sputtering Targets

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Kamis Sputtered Films for the Deposition of Thin and Sputtered Films

Sputtered FilmsSputtering is one of the most popular technologies for deposition of thin films or Sputtered Films. Although sputtering was first developed about 200 years ago, since World War II it has become increasingly important. This includes the creation of innovative devices. Also becoming fundamental in sustaining the growing demand for semiconductor circuits and other electronic devices.

Sputtering targets have found increasing penetration not in electronics. Additionally, it is in use in sectors such as mechanical/chemical, energy, optical coating, and life science, among others.

Fabrication processes for thin films

For decades sputtering was primarily used in microelectronics for fabrication of semiconductor devices. Though in recent years, the semiconductor industry transitions to new processes that allow for the fabrication of thin films below 20 nm.  Sputtering has found alternative sources of demand in other industry segments. It is used variously in such products as flat panel displays and solar cell manufacturing.

In fact, over time the availability of sputtering materials has expanded. This meets the requirements of the most varied applications within the electronics, mechanical/chemical, energy, optical coatings, life science, and food packaging sectors.

Got specific requirements or Questions about sputtering targets, evaporation material, crucible liners, metal foil, sheet, plate, or rod and wire? The technical staff at KAMIS is ready to provide expert knowledge to assist you with your project.

Therefore, contact KAMIS today at 845-628-6173 or click the blue button below for quick answers and attention from our knowledgeable staff.

KAMIS prides itself on consistently providing high quality materials and dependable service. We stand behind every product we deliver. If you are ever unsatisfied with your material, contact KAMIS for a full replacement or refund.

Kamis Inc

The entire support staff and sales engineers at KAMIS are always available during business hours. Call us to answer your technical questions and offer guidance on your projects.

Finally, our expertise and commitment to supplying high quality products and service has enabled KAMIS to earn thousands of satisfied customers around the world.

thin film applications

Thin Metal Films Analysis: Sputtered Neutral Mass Spectrometry

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It’s Kamis for Thin Metal Films

Thin Metal FilmsSputtered Neutral Mass Spectrometry is perfect for analyzing thin metal films where composition, thickness and interface condition can be determined. The example presented here, shows a magnetic film stack comprising Cr, Ni, Cu and Fe. Of the different methods of data storage, magnetic hard discs still offer highly economic means for high density rapid access.

The continual move towards more and more compact read/write heads. While more closely spaced data tracks has lead to a considerable development of magnetic materials and structures for this demanding application. Analysis of the metallic layer structures used in magnetic data storage is vital for both development and quality management. Included is secondary ion mass spectrometry (SIMS) and sputtered neutral mass spectrometry (SNMS). These offering information on minor and major element composition respectively.

SIMS and SNMS

Both SIMS and SNMS use a concentrated, mono- energetic, chemically pure ion beam of typically 1-10 keV to sputter erode the surface under study. Mass spectrometry technique: all elements and isotopes may be detected, and in favorable conditions the detection limit can be in the low ppb region. However, because the ionization mechanism for SIMS takes place at the sample surface, it is very much dependent on the local chemistry and the ionized fraction can vary by several orders of magnitude. This makes SIMS ideal for trace analysis in materials of known matrix. SNMS overcomes the “matrix effect” by separating the sputtering and ionization events.

Got specific requirements or Questions about sputtering targets, evaporation material, crucible liners, metal foil, sheet, plate, or rod and wire? The technical staff at KAMIS is ready to provide expert knowledge to assist you with your project.

Therefore, contact KAMIS today at 845-628-6173 or click the blue button below for quick answers and attention from our knowledgeable staff.

KAMIS prides itself on consistently providing high quality materials and dependable service. We stand behind every product we deliver. If you are ever unsatisfied with your material, contact KAMIS for a full replacement or refund.

Kamis Inc

The entire support staff and sales engineers at KAMIS are always available during business hours. Call us to answer your technical questions and offer guidance on your projects.

Finally, our expertise and commitment to supplying high quality products and service has enabled KAMIS to earn thousands of satisfied customers around the world.

Thin Film Vacuum Coating

Metal Targets During Sputtering

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KAMIS Consistently Provides High Quality Metal Targets

Metal TargetsKAMIS provides a range of forms, sizes and configurations of pure PVD sputtering metal targets for thin film coating applications. Consequently, our metal sputtering targets are guaranteed for reproducibility, homogeneity and uniformity.

When a Cu surface is sputtered by ion bombardment under the condition that Mo atoms arrive at the Cu surface during sputtering an unexpected phenomenon can arise: the surface of the Cu target becomes covered with microscopic cones. Also contact KAMIS about Au, Pt, Gd, Be, Ca, Sm, Ag, W, Zn, Ti, Nb, Pd, Sc, Cr, Rh, Mn, metal sputtering targets.

Dense Cone Coverage and Sputtering Yield

The cone density increases with increasing flux density of arriving Mo atoms. When the cones are closely spaced they give the target a velvet-like black appearance. The result of dense cone coverage are a lower sputtering yield and a more oblique ejection of sputtered material.

Finally, the cone tops seem to consist of Mo nuclei which are constantly replenished via surface migration and protect the underlying Cu from being sputtered.

Got specific requirements or Questions about sputtering targets, evaporation material, crucible liners, metal foil, sheet, plate, or rod and wire? The technical staff at KAMIS is ready to provide expert knowledge to assist you with your project.

Contact KAMIS today at 845-628-6173 or click the blue button below for quick answers and attention from our knowledgeable staff.

KAMIS prides itself on consistently providing high quality materials and dependable service. We stand behind every product we deliver. If you are ever unsatisfied with your material, contact KAMIS for a full replacement or refund.

Kamis Inc

The entire support staff and sales engineers at KAMIS are always available during business hours. Call us to answer your technical questions and offer guidance on your projects.

Our expertise and commitment to supplying high quality products and service has enabled KAMIS to earn thousands of satisfied customers around the world.

Thin Film Vacuum Coating

Thin Film Sputtering Composition Measure

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Thin Film Sputtering Composition Technique in the Sputtering Process

Thin Film SputteringSecondary Ion Mass Spectrometry (SIMS) is a Thin Film Sputtering technique. Used in materials, this science studies the composition of thin films and solid surfaces. Implemented by using the sputtering the sample’s surface with a focused primary ion beam.

In recent years, there has been an increasing interest in studying dopants and contaminants in thin layers near surface in samples. This is due to device structures get smaller and smaller.

SIMS can be used for examining the elementary composition of the surface as well as near surface region of samples. Measured sensitivity is down to parts per billion. In order to get the maximum performance from the device, atmospheric contaminants with low atomic weight such as and oxygen (O), carbon (C), and hydrogen (H) should have low concentration levels.

SIMS: A High Sensitivity Surface Analysis Technique

In SIMS analysis, contamination of hydrocarbons on the surface of the sample to be assessed may produce incorrect results. Hydrocarbons exist abundantly in ambient atmosphere. Therefore, these often deposit on the surface of samples when exposed to air.

During SIMS analysis, the atmospheric contamination on the surface can be embedded into the sample by means of a primary ion beam. Consequently, this contamination leads to distorted or spurious profiles. Therefore, it is very important for operators to know whether they are determining the surface’s composition, or just viewing an artifact caused by contamination.

Got specific requirements or Questions about sputtering targets, evaporation material, crucible liners, metal foil, sheet, plate, or rod and wire? The technical staff at KAMIS is ready to provide expert knowledge to assist you with your project.

Contact KAMIS today at 845-628-6173 or click the blue button below for quick answers and attention from our knowledgeable staff.

KAMIS prides itself on consistently providing high quality materials and dependable service. We stand behind every product we deliver. If you are ever unsatisfied with your material, contact KAMIS for a full replacement or refund.

Kamis Inc

The entire support staff and sales engineers at KAMIS are always available during business hours to answer your technical questions and offer guidance on your projects.

Our expertise and commitment to supplying high quality products and service has enabled KAMIS to earn thousands of satisfied customers around the world.

Thin Film Vacuum Coating

Sputtering Target Bonding Preferred Method

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Sputtering Target Bonding Methods

Sputtering Target BondingMetallic bonding delivers excellent thermal conductivity and is recommended for most sputtering target bonding applications.

The most effective metallic bonding is with indium and is the preferred Kamis sputtering target bonding method. Kamis uses only high purity indium for the majority of its bonding, to ensure the strongest bond between a sputtering target and a backing plate. Indium also offers enhanced elasticity to accommodate any expansion of the target when in use.

Another advantage of bonding sputtering targets is continued use if cracking occurs during thermal shock. Without bonding to a backing plate, a crack in a sputtering target is considered unusable.

Hot pressed targets are one of the best candidates for bonding; however Kamis can bond almost any type of sputtering target to a backing plate. If you are unsure if your sputtering target should be bonded, feel free to contact us for specific advice about your target and sputtering system requirements.

Most sputtering targets are bonded to copper backing plates or copper sheet, as this material offers enhanced thermal conductivity. Kamis also offers other sputtering target backing plate options including stainless steel, molybdenum and aluminum.

Additionally, Kamis stocks numerous sputtering targets and backing plates in a wide variety of sizes and purities to work with multiple sputtering systems. Kamis also offers custom alloys and composites manufactured to your sputtering target specifications.

Kamis can bond a sputtering target to a new backing plate or to your previously used backing plate. Additionally, we have experience in bonding to a variety of backing plates including ones with holes, clips and other variations.

In addition to bonding, Kamis also offers a de-bonding service to remove your spent sputtering target from your backing plate. High purity sputtering targets can be reclaimed when the target is no longer usable for sputtering.

The Kamis sales engineers are available to answer your unique sputtering target questions!

Got specific requirements or Questions about sputtering targets, evaporation material, crucible liners, metal foil, sheet, plate, or rod and wire? The technical staff at KAMIS is ready to provide expert knowledge to assist you with your project.

Contact KAMIS today at 845-628-6173 or click the blue button below for quick answers and attention from our knowledgeable staff.

KAMIS prides itself on consistently providing high quality materials and dependable service. We stand behind every product we deliver. If you are ever unsatisfied with your material, contact KAMIS for a full replacement or refund.

Kamis Inc

The entire support staff and sales engineers at KAMIS are always available during business hours to answer your technical questions and offer guidance on your projects.

Our expertise and commitment to supplying high quality products and service has enabled KAMIS to earn thousands of satisfied customers around the world.